Integration Technology of Interlayer and Intermetallic Dielectrics for High Density 32Mb FRAM

Author: Song Yoon J.   Joo H. J.   Jang N. W.   Lee S. Y.   Kim H. H.   Park Y. S.   Kim Kinam  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.48, Iss.1, 2002-01, pp. : 231-238

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content