Etch Characteristics of Ferroelectric (Bi4−xLax)Ti3O12 Thin Films in an Inductively Coupled Plasma

Author： Yoon Jin Koo   Byun Yo Han   Song Young Soo   Chung Chee Won   Lee June Key  

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.48, Iss.1, 2002-01, pp. : 239-244

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