Leakage Current Suppression of Pt/Bi4-xLaxTi3O12/Ru Capacitors by Post-Annealing of Ru Films

Author: FURUKAWA T.   KUROIWA T.   FUJISAKI Y.   SATO T.   ISHIWARA H.  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.62, Iss.1, 2004-01, pp. : 171-176

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