Preparation and Etching of Silicon-Based Piezoelectric Thin Films for Integrated Devices

Author： Zhao Hong-Jin Ren Tian-Ling Zhang Lin-Tao Liu Jian-She Liu Li-Tian Li Zhi-Jian

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.48, Iss.1, 2002-01, pp. : 271-279

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