SOL-GEL FABRICATION OF PZT THICK FILMS FOR MEMS

By Corkovic S.   Whatmore R. W.   Zhang Q.  

Integrated Ferroelectrics, Vol. 88, Iss. 1, 2007-02 ,pp. : 93-102

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Fabrication of Sol-Gel Thin Films of Silicate-Doped PZT

By TAMURA T.   HOKO H.   ARIMOTO Y.   ISHIWARA H.  

Integrated Ferroelectrics, Vol. 62, Iss. 1, 2004-01 ,pp. : 105-107

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EFFECT OF EXCESS Pb IN PT LAYERS ON MICROSTRUCTURE AND DIELECTRIC CHARACTERISTIC OF PT/PZT/PT THIN FILMS

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Integrated Ferroelectrics, Vol. 75, Iss. 1, 2005-10 ,pp. : 163-171

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Growth Stages of Sol-Gel Derived PZT(30/70) on Pt/Ti/SiO2 as Shown by SPM (PFM and Topography)

By Dunn S.   Zhang Q.   Whatmore R. W.  

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A Study on the Crystalline Orientation and Electromechanical Properties of PZT and Doped PZT Thin Films by Using the Sol-Gel Method

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Integrated Ferroelectrics, Vol. 130, Iss. 1, 2011-01 ,pp. : 12-20

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