LOW VOLTAGE 3 V OPERATION OF FERROELECTRIC MULTI-LAYER STACK MFIS STRUCTURE DEVICE FORMED BY PLASMA PHYSICAL VAPOR DEPOSITION AND OXYGEN RADICAL TREATMENT

Author: TAKAHASHI ICHIROU   SAKURAI HIROYUKI   ISOGAI TATSUFUMI   TERAMOTO AKINOBU   SUGAWA SHIGETOSHI   OHMI TADAHIRO  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.81, Iss.1, 2006-11, pp. : 47-55

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Abstract