STUDY OF ACOUSTICAL AND OPTICAL PROPERTIES OF ALN FILMS FOR SAW AND BAW DEVICES: CORRELATION BETWEEN THESE PROPERTIES

Author： ASSOUAR M. ELMAZRIA O. EL HAKIKI M. ALNOT P.

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.82, Iss.1, 2006-11, pp. : 45-54

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