LOW TEMPERATURE GROWTH OF SPUTTERED ALN FILMS FOR LAYERED STRUCTURE SAW DEVICES

Author: Assouar M. B.   Elmazria O.   Tiusan C.   Alnot P.  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.91, Iss.1, 2007-06, pp. : 119-128

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