GROWTH TEMPERATURE DEPENDENCE OF Ga2O3 THIN FILMS DEPOSITED BY PLASMA ENHANCED ATOMIC LAYER DEPOSITION

Author： Liu G. X.   Shan F. K.   Lee W. J.   Shin B. C.   Kim S. C.   Kim H. S.   Cho C. R.  

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.94, Iss.1, 2007-10, pp. : 11-20

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