Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition

Author： Ziegler Mario Fritzsch Ludwig Day Julia Linzen Sven Anders Solveig Toussaint Julia Meyer Hans-Georg

ISSN： 0953-2048

Source： Superconductor Science and Technology, Vol.26, Iss.2, 2013-02, pp. : 25008-25012

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