EFFECTS OF RAPID THERMAL ANNEALING ON MICROSTRUCTURES AND PROPERTIES OF PZT-PT/TI STACKS FOR MEMS APPLICATION

Author： Lu Jian Zhang Yi Ikehara Tsuyoshi Maeda Ryutaro Mihara Takashi

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.95, Iss.1, 2007-12, pp. : 3-16

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