

Author: Piekarski Brett Dubey Madan Zakar Eugene Polcawich Ronald DeVoe Don Wickenden Dennis
Publisher: Taylor & Francis Ltd
ISSN: 1058-4587
Source: Integrated Ferroelectrics, Vol.42, Iss.1, 2002-01, pp. : 25-37
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content


SOL-GEL FABRICATION OF PZT THICK FILMS FOR MEMS
By Corkovic S. Whatmore R. W. Zhang Q.
Integrated Ferroelectrics, Vol. 88, Iss. 1, 2007-02 ,pp. :




By Yoshida Shinya Wang Nan Kumano Masafumi Kawai Yusuke Tanaka Shuji Esashi Masayoshi
Journal of Micromechanics and Microengineering, Vol. 23, Iss. 6, 2013-06 ,pp. :


Fabrication of Sol-Gel Thin Films of Silicate-Doped PZT
By TAMURA T. HOKO H. ARIMOTO Y. ISHIWARA H.
Integrated Ferroelectrics, Vol. 62, Iss. 1, 2004-01 ,pp. :