Low-cost direct writing lithography system for the sub-micron range

Author： Becker Holger   Caspary Reinhard   Toepfer Christian   Schickfus Manfred V.   Hunklinger Siegfried  

Publisher： Taylor & Francis Ltd

ISSN： 1362-3044

Source： Journal of Modern Optics, Vol.44, Iss.9, 1997-09, pp. : 1715-1723

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