Tensile strength of aluminium nitride films

Author: Gang Zong Deng   Wo Ong Chung   Aravind Manju   Po Tsang Mei   Loong Choy Chung   Lu Deren   Ma Dejun  

Publisher: Taylor & Francis Ltd

ISSN: 1478-6443

Source: Philosophical Magazine, Vol.84, Iss.31, 2004-11, pp. : 3353-3373

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Abstract