Aluminium nitride thin films deposited by DC reactive magnetron sputtering

Author： Dimitrova V. Manova D. Paskova T. Uzunov T. Ivanov N. Dechev D.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.51, Iss.2, 1998-10, pp. : 161-164

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