Effects of the Al₂O₃ interlayer in ZnO thin-film transistors fabricated via atomic layer deposition

Author： Kim Seong-Hyeon Jeong Kwang-Seok Lee Ga-Won Lee Hi-Deok

ISSN： 1598-0316

Source： Journal of Information Display, Vol.14, Iss.2, 2013-06, pp. : 61-65

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