Squeeze film damping effect on switching time of a MOEMS optical switch

Author： Sun Dongming   Chen Weiyou   Dong Wei   Guo Wenbin   Liu Caixia   Wang Guodong   Yan Xin   Xu Baokun  

Publisher： Urban & Fischer

ISSN： 0030-4026

Source： Optik – International Journal for Light and Electron Optics, Vol.115, Iss.8, 2004-10, pp. : 380-384

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