Author： Hu Huan Swaminathan Vikhram V Mensing Glennys Yeom Junghoon Shannon Mark A Zhu Likun
Publisher： IOP Publishing
ISSN： 0960-1317
Source： Journal of Micromechanics and Microengineering, Vol.24, Iss.9, 2014-09, pp. : 95023-95031
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