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Author: Seong Baekhoon Yoo Hyunwoong Jang Yonghee Ryu Changkook Byun Doyoung
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.9, 2014-09, pp. : 97002-97006
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