Parallel multi-step nanolithography by nanoscale Cu-covered h-PDMS tip array

Author: Chang Yuan-Jen   Huang Han-Kuan  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.9, 2014-09, pp. : 95022-95028

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next