Low-temperature anodic bonding using thin films of lithium-niobate-phosphate glass

Author: Woetzel S   Kessler E   Diegel M   Schultze V   Meyer H-G  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.9, 2014-09, pp. : 95001-95006

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