Characterization of AlInN/AlN/GaN FET structures using x-ray diffraction, x-ray reflectometry and grazing incidence x-ray fluorescence analysis

Author： Lesnik Andreas Bläsing Jürgen Hennig Jonas Dadgar Armin Krost Alois

Publisher： IOP Publishing

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.47, Iss.35, 2014-09, pp. : 355106-355111

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