Finite element analysis on factors influencing the clamping force in an electrostatic chuck

Author: Xingkuo Wang   Jia Cheng   Kesheng Wang   Yiyong Yang   Yuchun Sun   Minglu Cao   Linhong Ji  

Publisher: IOP Publishing

ISSN: 1674-4926

Source: Journal of Semiconductors, Vol.35, Iss.9, 2014-09, pp. : 94011-94015

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