Related content

Microfabrication of a Novel Ceramic Pressure Sensor with High Sensitivity Based on Low-Temperature Co-Fired Ceramic (LTCC) Technology

By Li Chen   Tan Qiulin   Zhang Wendong   Xue Chenyang   Li Yunzhi   Xiong Jijun  

Micromachines, Vol. 5, Iss. 2, 2014-06 ,pp. : 396-407

MDPI

Access to resources Recommend Favorite

Fabrication and performance evaluation of a high temperature co-fired ceramic vaporizing liquid microthruster

By  

Journal of Micromechanics and Microengineering, Vol. 25, Iss. 1, 2015-01 ,pp. : 15013-15022

IOP Publishing

Access to resources Recommend Favorite

Investigation of a zirconia co-fired ceramic calorimetric microsensor for high-temperature flow measurements

By Lekholm Ville   Persson Anders   Klintberg Lena   Thornell Greger  

Journal of Micromechanics and Microengineering, Vol. 25, Iss. 6, 2015-06 ,pp. : 65014-65023

IOP Publishing

Access to resources Recommend Favorite

Wireless measurement for passive pressure sensors in high temperature environment

By Liu Wenyi   Tan Qiulin   Li Chen   Zheng Tingli   Ge Binger   Xiong Jijun   Liu Wenyi   Liu Wenyi  

Sensor Review, Vol. 35, Iss. 2, 2015-03 ,pp. : 146-156

Emerald Group Publishing Ltd

Access to resources Recommend Favorite

The design, simulation and fabrication of a novel horizontal sensitive inertial micro-switch with low g value based on MEMS micromachining technology

By Wang Yongliang   Feng Qiu   Wang Yan   Chen Wenguo   Wang Zhaoyu   Ding Guifu   Zhao Xiaolin  

Journal of Micromechanics and Microengineering, Vol. 23, Iss. 10, 2013-10 ,pp. : 105013-105022

IOP Publishing

Access to resources Recommend Favorite