Investigation on recovery of gap insulation strength and EUV radiation in the post-discharge stage of a laser-triggered discharge produced tin plasma EUV source

Author： Lu P   Kitajima S   Lim S   Katsuki S   Akiyama H   Teramoto Y  

Publisher： IOP Publishing

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.47, Iss.43, 2014-10, pp. : 435205-435218

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