High speed 3D surface profile without axial scanning: dual-detection confocal reflectance microscopy

Author: Lee Dong-Ryoung   Kim Young-Duk   Gweon Dae-Gab   Yoo Hongki  

Publisher: IOP Publishing

ISSN: 0957-0233

Source: Measurement Science and Technology, Vol.25, Iss.12, 2014-12, pp. : 125403-125408

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