Publisher: IOP Publishing
ISSN: 1742-6596
Source: Journal of Physics: Conference Series , Vol.100, Iss.4, 2008-03, pp. : 166-169
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Thermodynamic properties of 3C—SiC
By Thakore B. Y. Khambholja S. G. Vahora A. Y. Bhatt N. K. Jani A. R.
Chinese Physics B, Vol. 22, Iss. 10, 2013-10 ,pp. :
The ICP etching technology of 3C-SiC films
Journal of Physics: Conference Series , Vol. 34, Iss. 1, 2006-04 ,pp. :