Deposition of silicon-like hybrid films by PECVD on carbon-fiber-reinforced polymers for high-precision engineering applications

Publisher： IOP Publishing

ISSN： 1742-6596

Source： Journal of Physics: Conference Series , Vol.100, Iss.6, 2008-03, pp. : 26-29

Access to resources Favorite

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Integrated approach for low-temperature synthesis of high-quality silicon nitride films in PECVD using RF–UHF hybrid plasmas

By Sahu B B   Shin Kyung S   Han Jeon G  

Plasma Sources Science and Technology, Vol. 25, Iss. 1, 2016-02 ,pp. : 15017-15030

IOP Publishing

Access to resources Recommend Favorite

Experiment-Based Sensitivity Analysis of Scaled Carbon-Fiber-Reinforced Elastomeric Isolators in Bonded Applications

By Hedayati Dezfuli Farshad   Alam M. Shahria  

Fibers, Vol. 4, Iss. 1, 2016-01 ,pp. : 4-4

MDPI

Access to resources Recommend Favorite

Deposition and Properties of Thin PECVD Carbon Films After Rapid Thermal Annealing

By  

Le Journal de Physique IV, Vol. 05, Iss. C5, 1995-06 ,pp. : C5-615-C5-619

Edp Sciences

Access to resources Recommend Favorite

Two mechanisms of compression failure of unidirectional carbon-fiber-reinforced plastics

By Bazhenov S.   Berlin A.  

Doklady Physics, Vol. 46, Iss. 7, 2001-07 ,pp. : 484-487

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite

Electron-impact silane dissociation and deposition rate relationship in the PECVD of microcrystalline silicon thin films

By  

Le Journal de Physique IV, Vol. 11, Iss. PR3, 2001-08 ,pp. : Pr3-715-Pr3-722

Edp Sciences

Access to resources Recommend Favorite