Publisher: IOP Publishing
ISSN: 1742-6596
Source: Journal of Physics: Conference Series , Vol.26, Iss.1, 2006-02, pp. : 183-186
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
UHV CHEMICAL VAPOUR DEPOSITION OF UNDOPED AND IN-SITU DOPED POLYSILICON FILMS
Le Journal de Physique IV, Vol. 02, Iss. C2, 1991-09 ,pp. :
By Bernay C. Ringuede A. Colomban P. Lincot D. Cassir M.
Journal of Physics and Chemistry of Solids, Vol. 64, Iss. 9, 2003-09 ,pp. :
Chemical vapour deposition of Al
Le Journal de Physique IV, Vol. 03, Iss. C3, 1993-08 ,pp. :