Understanding and preventing beam damage effects in partially processed high-k gate stacks
Publisher: IOP Publishing
ISSN: 1742-6596
Source: Journal of Physics: Conference Series , Vol.26, Iss.1, 2006-02, pp. : 231-234
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
High-k HfTaO stacks in response to microwave irradiation
Journal of Physics: Conference Series , Vol. 253, Iss. 1, 2010-11 ,pp. :