Publisher： IOP Publishing
ISSN： 1742-6596
Source： Journal of Physics: Conference Series , Vol.362, Iss.1, 2012-05, pp. : 1-2
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Measuring Micro-Friction Torque in MEMS Gas Bearings
Sensors, Vol. 16, Iss. 5, 2016-05 ,pp. :
Access to resources
Recommend
Simulation of gas flows in micro/nano systems using the Burnett equations
Journal of Physics: Conference Series , Vol. 362, Iss. 1, 2012-05 ,pp. :
Development of Pressure-Sensitive Channel Chip for Micro Gas Flows
Journal of Physics: Conference Series , Vol. 362, Iss. 1, 2012-05 ,pp. :
Thermal-Pressure-Driven Gas Flows through Micro Channels
Journal of Physics: Conference Series , Vol. 362, Iss. 1, 2012-05 ,pp. :