Measuring Micro-Friction Torque in MEMS Gas Bearings

Author: Fang Xudong   Liu Huan  

Publisher: MDPI

E-ISSN: 1424-8220|16|5|726-726

ISSN: 1424-8220

Source: Sensors, Vol.16, Iss.5, 2016-05, pp. : 726-726

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Abstract