Publisher: IOP Publishing
ISSN: 1742-6596
Source: Journal of Physics: Conference Series , Vol.34, Iss.1, 2006-04, pp. : 904-911
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Fabrication of a MEMS micro-hotplate
Journal of Physics: Conference Series , Vol. 276, Iss. 1, 2011-02 ,pp. :
By Liu Fengli Alici Gursel Zhang Binbin Beirne Stephen Li Weihua
Smart Materials and Structures, Vol. 24, Iss. 3, 2015-03 ,pp. :
InP-based micro-opto-electro-mechanical systems (MOEMS)
Le Journal de Physique IV, Vol. 09, Iss. PR2, 1999-02 ,pp. :
Fabrication and Characterization of CMOS-MEMS Thermoelectric Micro Generators
By Kao Pin-Hsu Shih Po-Jen Dai Ching-Liang Liu Mao-Chen
Sensors, Vol. 10, Iss. 2, 2010-02 ,pp. :