Fabrication and Characterization of CMOS-MEMS Thermoelectric Micro Generators

Author: Kao Pin-Hsu   Shih Po-Jen   Dai Ching-Liang   Liu Mao-Chen  

Publisher: MDPI

E-ISSN: 1424-8220|10|2|1315-1325

ISSN: 1424-8220

Source: Sensors, Vol.10, Iss.2, 2010-02, pp. : 1315-1325

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Abstract