Applying low-energy multipulse excimer laser annealing to improve charge retention of Au nanocrystals embedded MOS capacitors

Publisher: IOP Publishing

E-ISSN: 1361-6463|48|5|55101-55110

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.48, Iss.5, 2015-02, pp. : 55101-55110

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