Author： Shen Zhiyuan Liu Shuwei Miao Jianmin Wang Zhihong Shen Zhiyuan
Publisher： IOP Publishing
E-ISSN： 1361-6439|25|3|35004-35010
ISSN： 0960-1317
Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.3, 2015-03, pp. : 35004-35010
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