Profile and depth prediction in single-pass and two-pass CO2 laser microchanneling processes

Author： Prakash Shashi   Kumar Subrata  

Publisher： IOP Publishing

E-ISSN： 1361-6439|25|3|35010-35019

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.3, 2015-03, pp. : 35010-35019

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