Wafer-scale fabrication of self-actuated piezoelectric nanoelectromechanical resonators based on lead zirconate titanate (PZT)

Author： Dezest D Thomas O Mathieu F Mazenq L Soyer C Costecalde J Remiens D Deü J F Nicu L

Publisher： IOP Publishing

E-ISSN： 1361-6439|25|3|35002-35012

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.3, 2015-03, pp. : 35002-35012

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