Author: Joo Sung-Jun Park Buhm Kim Do-Hyoung Kwak Dong-Ok Song In-Sang Park Junhong Kim Hak-Sung
Publisher: IOP Publishing
E-ISSN: 1361-6439|25|3|35021-35029
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.3, 2015-03, pp. : 35021-35029
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Abstract
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