Room-temperature gettering of Au in Si wafers with surface defects under small dose γ-ray radiation

Publisher: IOP Publishing

E-ISSN: 1361-6463|48|10|105101-105106

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.48, Iss.10, 2015-03, pp. : 105101-105106

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Abstract