Room-temperature diffusion and gettering of Au in silicon stimulated by MeV electron irradiation

Author： Qin Laixiang   Zhang Yu   Hou Rouxiang   Xie Ziang   Wang Wei   Xu Wanjing   Qin G G  

Publisher： IOP Publishing

E-ISSN： 1361-6463|48|27|275103-275107

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.48, Iss.27, 2015-06, pp. : 275103-275107

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