Experimental diagnostics of plasma radial uniformity and comparisons with computational simulations in capacitive discharges

Author： Liu Yong-Xin   Liang Ying-Shuang   Wen De-Qi   Bi Zhen-Hua   Wang You-Nian  

Publisher： IOP Publishing

E-ISSN： 1361-6595|24|2|25013-25025

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.24, Iss.2, 2015-04, pp. : 25013-25025

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