Plasma diagnostics for understanding the plasma–surface interaction in HiPIMS discharges: a review

Author： Britun Nikolay   Minea Tiberiu   Konstantinidis Stephanos   Snyders Rony  

Publisher： IOP Publishing

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.47, Iss.22, 2014-06, pp. : 224001-224046

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