A feedback model of magnetron sputtering plasmas in HIPIMS

Author： Ross A E Ganesan R Bilek M M M McKenzie D R

E-ISSN： 1361-6595|24|2|25018-25028

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.24, Iss.2, 2015-04, pp. : 25018-25028

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