Directional growth of nanocrystalline Si nanorod array by mid‐frequency magnetron sputtering

Publisher: John Wiley & Sons Inc

E-ISSN: 1862-6319|212|3|573-578

ISSN: 1862-6300

Source: PHYSICA STATUS SOLIDI (A) APPLICATIONS AND MATERIALS SCIENCE, Vol.212, Iss.3, 2015-03, pp. : 573-578

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Abstract