Publisher: John Wiley & Sons Inc
E-ISSN: 1612-8869|12|3|260-270
ISSN: 1612-8850
Source: PLASMA PROCESSES AND POLYMERS (ELECTRONIC), Vol.12, Iss.3, 2015-03, pp. : 260-270
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Physical properties of plasma deposited SiO x thin films
By San Andres E. del Prado A. Martil I. Gonzalez G. Martnez F.L. Bravo D. Lopez F.J. Fernandez M.
Vacuum, Vol. 67, Iss. 3, 2002-09 ,pp. :