Effect of Ion Irradiation on the Structural Properties and Hardness of a-C:H:Si:O:F Films

Publisher: IOP Publishing

E-ISSN: 1742-6596|591|1|347-360

ISSN: 1742-6596

Source: Journal of Physics: Conference Series , Vol.591, Iss.1, 2015-03, pp. : 347-360

Access to resources Favorite

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content