Interface fracture and chemistry of a tungsten-based metallization on borophosphosilicate glass

Author： Völker B.   Heinz W.   Matoy K.   Roth R.   Batke J.M.   Schöberl T.   Scheu C.   Dehm G.  

Publisher： Taylor & Francis Ltd

E-ISSN： 1478-6443|95|16-18|1967-1981

ISSN： 1478-6443

Source： Philosophical Magazine, Vol.95, Iss.16-18, 2015-06, pp. : 1967-1981

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