XPS characterization of tungsten-based contact layers on 4H-SiC

Author: Kakanakova-Georgieva A.   Marinova T.   Noblanc O.   Arnodo C.   Cassette S.   Brylinski C.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.337, Iss.1, 1999-01, pp. : 180-183

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Abstract