Investigation of the adhesion of perforated MEMS clamped–clamped beams based on the GaAs MMIC process with the resonant method

Author： Wang Kaiyue Liao Xiaoping Zhang Zhiqiang

Publisher： Taylor & Francis Ltd

E-ISSN： 1568-5616|29|16|1663-1679

ISSN： 1568-5616

Source： Journal of Adhesion Science and Technology, Vol.29, Iss.16, 2015-08, pp. : 1663-1679

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